By Semiconductor Process
Epitaxy & Annealing
Ultra-high-purity quartz and sapphire components for epitaxial growth and high-temperature annealing. Extreme thermal cycling resistance required.
Components for Epitaxy & Annealing
Quartz Dome / Bell Jar (Epitaxy)
Optical clarity · Ø up to 450 mm
Quartz Susceptor Tray
Flat ±0.005 mm · high-temp stable
Quartz Liner (Epitaxy Reactor)
Custom profile · Ra < 0.2 μm