Product Catalog
제품
Precision quartz, sapphire, and ceramic components for semiconductor and advanced manufacturing processes.
By Semiconductor Process
반도체 공정별
By Component Type
부품 유형별
Tubes & Liners
Process tubes, furnace liners, reactor tubes
Boats & Carriers
Wafer boats, carriers, boat racks
Rings & Flanges
Focus rings, sealing flanges, positioning rings
Plates & Windows
Observation windows, baffles, discs
Chambers & Bell Jars
Reaction chambers, bell jars, domes
Custom Parts
Drawing-based fabrication
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13 results
Quartz Diffusion Tube
High-purity fused quartz diffusion and oxidation tubes for semiconductor furnaces — straight bore, flanged, and bell-end configurations for 4" to 12" wafer processes.
Quartz Wafer Boat
Precision-machined fused quartz wafer boats for horizontal and vertical diffusion furnaces — 25-slot standard and custom slot count for 4" to 12" wafers.
Quartz Flanges & Fittings
Precision-machined fused quartz flanges, reducers, elbows, and tube fittings for semiconductor gas lines and furnace tube assemblies — compatible with standard metal flange interfaces.
Quartz Focus Ring & Etch Ring
Precision-machined fused quartz focus rings, etch rings, and edge rings for plasma etching and CVD chambers — ±0.01 mm tolerance, Ra 0.1 μm surface finish.
Quartz Bell Jar & Dome
Blown and formed fused quartz bell jars and domes for CVD, epitaxy, and sputtering reactor enclosures — up to 500 mm diameter with hermetic weld flanges.
Quartz Cleaning Tank
Welded fused quartz wet cleaning vessels for HF, SC-1, SC-2, and piranha semiconductor cleaning processes — single and cascade configurations, custom sizes.
Quartz Gas Injector & Showerhead
Precision multi-hole quartz gas injectors and showerheads for uniform gas distribution in CVD, ALD, and diffusion furnace systems — hole arrays to ±0.02 mm positional accuracy.
Quartz Reactor Tube
High-purity fused quartz reactor tubes for epitaxy, CVD, and RTP systems — available with polished inner bore, side ports, and precision-ground flanges for process chamber integration.
Quartz Viewport Window
Optically polished fused quartz and sapphire viewport windows for semiconductor process chamber monitoring — UV to mid-IR transmission, hermetic metal or CF flanges.
Quartz Baffle & Insert
Custom-machined fused quartz baffles, liners, and thermal shields for semiconductor furnace tubes, diffusion systems, and CVD reactors.
Sapphire Window & Optical Flat
Single-crystal sapphire windows and optical flats for semiconductor process chambers — UV to mid-IR transmission, Ra < 0.1 nm, extreme plasma and chemical resistance.
Ceramic Wafer Carrier & Boat
High-purity alumina and silicon carbide wafer carriers, boats, and cassettes for high-temperature semiconductor processes — superior wear resistance and thermal shock capability.
Custom Precision Parts
Drawing-based custom fabrication of fused quartz, sapphire, and technical ceramic components — from prototype to production, any geometry, any specification.
맞춤형 솔루션
Have a drawing or unique specification? We fabricate custom quartz, sapphire, and ceramic components to your exact requirements.
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