FUSED QUARTZ
Quartz Baffle & Insert
Custom-machined fused quartz baffles, liners, and thermal shields for semiconductor furnace tubes, diffusion systems, and CVD reactors.
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Quartz Baffles, Liners & Thermal Inserts
Baffles and inserts serve secondary but critical roles in semiconductor thermal processing equipment:
- Gas flow baffles — condition gas entering or exiting the process tube for uniform flow distribution
- Thermal shields — reduce end-zone temperature gradients in horizontal furnaces
- Tube liners — replaceable inner liner protects the primary process tube from deposition buildup
- Boat stands — support wafer boats at the correct height and position
Product Types
Disc Baffle (Gas Flow Conditioner)
Flat quartz disc with central hole and optional peripheral holes — installed at furnace tube ends to condition gas entry.
| Parameter | Value |
|---|---|
| OD tolerance | ±0.3 mm |
| Thickness tolerance | ±0.2 mm |
| Central hole diameter | Tube ID clearance fit |
| Flatness | < 0.1 mm |
| Available in | Transparent (Grade 1) or Opaque (Grade 3) |
Tube Liner (Process Tube Insert)
Thin-wall quartz tube inserted inside the main process tube — receives deposition buildup and is periodically replaced, extending the life of the primary tube.
| Parameter | Value |
|---|---|
| Wall thickness | 1.5–3 mm |
| OD clearance in process tube | 0.5–2 mm radial |
| Length | Matched to process zone ± 20 mm |
| Material | Grade 1 or Grade 2 (matching process tube) |
Thermal End Shield
Opaque fused quartz (Grade 3) discs or plugs inserted at furnace tube ends to reflect infrared radiation back into the process zone, improving temperature uniformity.
- High IR reflectivity (> 90%) reduces end-zone heat loss
- Multiple discs stacked for improved insulation
- Available in sizes matching all standard furnace tube IDs
Boat Stand / Pedestal
Quartz pedestal supporting the wafer boat at the correct height for process gas exposure.
- Height precision: ±0.5 mm
- Material: Grade 1 quartz
- Geometry: Post, saddle, or platform type per furnace OEM specification
Customization
All baffle and insert components are manufactured to customer drawings. Common custom requests:
- Non-circular hole patterns (slots, arcs) in disc baffles
- Threaded quartz inserts (M6–M16)
- Composite assemblies (baffle welded to tube section)
- Color-coded opaque vs. transparent zones