FUSED QUARTZ
Quartz Gas Injector & Showerhead
Precision multi-hole quartz gas injectors and showerheads for uniform gas distribution in CVD, ALD, and diffusion furnace systems — hole arrays to ±0.02 mm positional accuracy.
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Quartz Gas Injectors & Showerheads
Uniform gas distribution is critical to film thickness uniformity in CVD, ALD, and diffusion processes. Quartz gas injectors and showerheads provide precisely located, precisely sized orifice arrays that ensure the process gas reaches the wafer surface with the correct velocity profile and spatial uniformity.
Product Types
Tube Injector (Side-Port / Bubbler Style)
A quartz tube with laser-drilled or diamond-drilled holes along its length — inserted into a furnace tube to distribute gas along the wafer stack.
| Parameter | Specification |
|---|---|
| Tube OD | 6–25 mm |
| Hole diameter | 0.3–2.0 mm |
| Hole position accuracy | ±0.02 mm |
| Hole pitch tolerance | ±0.05 mm |
| He leak rate (end fittings) | < 1×10⁻⁹ mbar·L/s |
| Available lengths | Up to 1500 mm |
Flat Showerhead Plate
A flat quartz plate with a precisely patterned hole array — provides uniform shower-type gas delivery over a large wafer area.
| Parameter | Specification |
|---|---|
| Max plate size | 500 × 500 mm |
| Min hole diameter | 0.5 mm |
| Hole position accuracy | ±0.02 mm |
| Hole count | Up to 2,000 holes |
| Plate thickness tolerance | ±0.05 mm |
| Flatness | < 0.1 mm |
Hole patterns are CNC-programmed from customer CAD files or designed by our engineers for optimal flow distribution.
Annular Gas Ring Injector
Circular quartz ring with inward-facing holes — delivers gas symmetrically around the perimeter of a chamber for radial flow profiles.
| Parameter | Specification |
|---|---|
| Ring OD | 100–500 mm |
| Hole diameter | 0.5–3.0 mm |
| Angular hole spacing | ±0.1° |
| Ring cross-section | Round or D-profile |
| Material | Grade 1 or Grade 2 |
Drilling Accuracy
Hole arrays require exceptional positional accuracy to achieve the uniform flow conductance required for thickness uniformity. Our CNC diamond drilling centers achieve:
| Metric | Value |
|---|---|
| Hole position (CNC grid) | ±0.02 mm |
| Hole diameter repeatability | ±0.01 mm |
| Hole roundness | ±0.005 mm |
| Taper (per 10 mm depth) | < 0.01 mm |
| Exit chipping | < 0.1 mm |
All multi-hole parts are 100% inspected against CAD pattern using CMM or optical comparator before shipment.
Flow Conductance Uniformity
The practical requirement for showerheads is flow uniformity — not just positional accuracy. We offer:
- Flow conductance simulation (CFD) for hole pattern design upon request
- Differential pressure test at customer-specified flow rate for production lot verification
- Matched-conductance replacement parts (within ±2% of original conductance)