加工能力
Quality Inspection & Metrology
Full in-house metrology capability: CMM dimensional inspection, AFM/profilometer surface analysis, helium leak testing, ICP-OES purity verification, and ISO 9001-documented quality records.
Quality Inspection & Metrology
Every Tuguan Semiconductor component leaves our facility with documented, traceable quality records. Our in-house metrology laboratory covers dimensional inspection, surface characterization, purity verification, and functional testing �?eliminating dependency on third-party testing laboratories for most routine quality requirements.
Dimensional Inspection
Coordinate Measuring Machine (CMM)
| Capability | Specification |
|---|---|
| Volumetric accuracy | ±0.001 mm (MPEE) |
| Repeatability | ±0.0005 mm |
| Measuring range | 600 × 700 × 500 mm |
| Touch probe | 1 mm ruby sphere |
| Scanning mode | Yes (surface form) |
| Report format | PDF + DXF comparison overlay |
CMM inspection is performed on all precision components with tolerances �?±0.05 mm. A full dimensional report tracing every measured feature to the customer drawing is provided as standard.
Optical & Laser Measurement
For large, thin, or delicate parts where CMM contact could cause breakage:
| Instrument | Parameter | Resolution |
|---|---|---|
| Laser micrometer | OD, wall thickness | 0.001 mm |
| Optical comparator (30×) | Profile, angles, radii | 0.01 mm |
| Digital height gauge | Step heights, parallelism | 0.001 mm |
Surface Metrology
White-Light Interferometer
| Parameter | Specification |
|---|---|
| Vertical resolution | 0.1 nm |
| Lateral resolution | 0.4 μm |
| Measurement area | Up to 10 × 10 mm per field |
| Stitching | Yes �?up to 200 × 200 mm |
| Output | Ra, Rq, flatness map, 3D surface topography |
Used for: Optical surface verification (λ/4, λ/10 flatness), CMP-polished surfaces, weld seam flatness.
Contact Profilometer
| Parameter | Specification |
|---|---|
| Vertical resolution | 0.01 nm |
| Stylus force | 0.02�? mN (selectable) |
| Scan length | Up to 100 mm |
| Output | Ra, Rq, Rz, Rmax, Rsm; full roughness profile |
Used for: Production Ra verification on ground and lapped surfaces; compliance with drawing Ra call-outs.
Atomic Force Microscope (AFM)
| Parameter | Specification |
|---|---|
| Vertical resolution | 0.01 nm RMS |
| Scan area | 100 × 100 μm standard |
| Mode | Tapping mode (non-destructive) |
| Output | RMS roughness, 3D nanoscale map |
Used for: Optical polishing verification (Ra < 0.5 nm), subsurface damage studies, bonding surface qualification.
Leak Testing
Helium Mass Spectrometer Leak Tester
| Parameter | Specification |
|---|---|
| Sensitivity | 1×10⁻¹⁰ mbar·L/s (MLD) |
| Standard pass criterion | < 1×10⁻⁹ mbar·L/s |
| High-integrity pass criterion | < 1×10⁻¹⁰ mbar·L/s (on request) |
| Method | Helium hood or vacuum chamber |
| Applicable components | Welded vessels, closed cavities, vacuum-rated assemblies |
100% leak testing is performed on all fusion-welded quartz assemblies used in vacuum or gas-handling applications.
Material Purity Verification
ICP-OES (Inductively Coupled Plasma Optical Emission Spectrometry)
| Parameter | Specification |
|---|---|
| Analytes | Na, K, Li, Ca, Mg, Fe, Cr, Ni, Cu, Al, B, and 20+ trace metals |
| Detection limit | < 1 ppb (element-dependent) |
| Sample preparation | Acid dissolution or surface leach |
| Turnaround | 1�? working days |
Purity certificates with full ICP-OES data are provided as standard for synthetic fused silica Grade 2 components and on request for all other materials.
Crystal & Optical Characterization
X-Ray Diffraction (XRD) �?Crystal Orientation
| Parameter | Specification |
|---|---|
| Crystal orientation accuracy | ±0.1° (standard) / ±0.5° (production) |
| Applicable materials | Sapphire, single-crystal materials |
| Method | Laue back-reflection or rocking curve |
| Report | Orientation map + deviation from nominal |
XRD orientation verification is standard on all sapphire components with specified crystal orientation.
Polariscope �?Birefringence Measurement
| Parameter | Specification |
|---|---|
| Sensitivity | 1 nm/cm retardation |
| Measurement range | 0�?00 nm/cm |
| Applicable materials | Transparent quartz and fused silica |
| Standard criterion | < 10 nm/cm (< 5 nm/cm optical grade) |
UV-VIS-NIR Transmission Measurement
Optical transmission verification from 190 nm to 2500 nm using a calibrated spectrophotometer. Provided for optical-grade windows, viewports, and laser optics on request.
Quality Management System
Tuguan Semiconductor operates under ISO 9001 quality management:
| Element | Details |
|---|---|
| QMS Standard | ISO 9001:2015 |
| Calibration | All instruments calibrated traceable to NIST/NIM national standards |
| Non-conformance | Documented NCR system; root cause + corrective action |
| First Article Inspection | Full FAI report on new part numbers (optional PPAP format) |
| Lot traceability | Heat number + material cert + inspection records linked to each shipment |
Standard documents shipped with every order:
- Material certificate (purity data)
- Dimensional inspection report (CMM printout)
- Surface roughness report (Ra measurement)
- Certificate of Conformance (ISO 9001)
Optional documents (request at order placement):
- Birefringence test report
- He leak test certificate
- XRD crystal orientation report
- ICP-OES trace metal analysis
- Optical transmission test report