Quartz Flanges & Fittings

FUSED QUARTZ

Quartz Flanges & Fittings

Precision-machined fused quartz flanges, reducers, elbows, and tube fittings for semiconductor gas lines and furnace tube assemblies — compatible with standard metal flange interfaces.

Individuelle Abmessungen und Spezifikationen auf Anfrage möglich.

Quartz Flanges & Fittings

Quartz flanges connect quartz tubes, vessels, and injectors to each other and to metal components in furnace and gas-handling systems. The flange interface must be dimensionally compatible with the mating metal flange, and the quartz body must accommodate the thermal expansion differential between quartz (CTE 0.55×10⁻⁶/°C) and metal (CTE 10–17×10⁻⁶/°C).


Flange Types

Flat-Face Welded Flange

A solid quartz disc with a precision-ground flat face and bore, fusion-welded to the tube end.

SpecificationValue
Face flatness< 0.05 mm
Bore tolerance±0.05 mm
Perpendicularity< 0.1 mm TIR
OD range50–400 mm
Available face finishesGround, lapped, polished

Stepped / Rabbet Flange

Flange with a machined shoulder (rabbet) that locates concentrically with the mating metal flange bore — provides self-centering for alignment-sensitive assemblies.

SpecificationValue
Rabbet diameter tolerance±0.05 mm
Step height tolerance±0.1 mm
Concentricity (rabbet to bore)< 0.05 mm TIR

Fittings & Adapters

Part TypeDescription
Reducing couplerJoins two tubes of different OD in-line
90° elbowQuartz tube bent to 90° ± 1°
T-pieceBranch junction, all three ports welded
Tube-to-flange adapterConverts tube OD to flange face interface
End capClosed flat or domed end
Ground joint (24/29, 34/35)Standard laboratory glass taper joints

All fittings are fusion-welded and annealed, with He leak test (< 1×10⁻⁹ mbar·L/s) on all weld joints.


Interface Compatibility

Mating Flange SystemQuartz Equivalent Available
ASA (ANSI) pipe flange
ISO-KF (NW) quick-flange✓ (quartz body + metal ring)
Custom OEM bolt pattern✓ (drawing-based)
Swagelok tube fitting✓ (quartz stub + SS nut)

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