Material Science
Materialien
From ppb-purity synthetic fused silica to single-crystal sapphire — choose the right material for your semiconductor process requirements.
Fused Quartz Glass
Natural & Synthetic Grades
Amorphous silicon dioxide glass with exceptional thermal stability, UV transparency, and ultra-low thermal expansion. Available in natural fused quartz and high-purity synthetic fused silica grades.
- SiO₂ purity: 99.99–99.9999%
- CTE: 0.55 × 10⁻⁶/°C
- T_max: 1200°C
- UV transmittance: 190–3500 nm
Sapphire
Single-Crystal Al₂O₃
Single-crystal aluminium oxide with extreme hardness, chemical inertness, and broadband optical transparency. Ideal for high-temperature viewports, optical windows, and wear-resistant components.
- Hardness: 9 Mohs
- T_max: 1900°C
- UV-IR transparent: 0.14–6 μm
- Chemical: highly inert
Precision Ceramics
Al₂O₃ · Si₃N₄ · BN · SiC
Advanced technical ceramics offering tailored combinations of hardness, thermal conductivity, electrical insulation, and chemical resistance. Four material grades available.
- Alumina Al₂O₃: high hardness + insulation
- Silicon Nitride Si₃N₄: thermal shock resistance
- Boron Nitride BN: thermal conductivity + machinability
- Silicon Carbide SiC: extreme hardness + conductivity
Grade Selector
Quartz Glass Grades Comparison
| Grade Name | Code Equivalent | Purity | OH Content | Max Temperature | Best For |
|---|---|---|---|---|---|
| Natural Fused Quartz | GE-124 / KU-1 equivalent | 99.99% SiO₂ | <30 ppm OH | 1150°C continuous / 1400°C short-term | Diffusion tubes, Furnace tubes, Wafer boats |
| Synthetic Fused Silica (High Purity) | Equivalent to Momentive HPFS / Heraeus Suprasil | >99.9999% SiO₂ | 800–1200 ppm OH (standard) / <1 ppm OH (dry grade) | 1200°C continuous | Semiconductor wet etching, CVD chambers, Precision optical components |
| Opaque Fused Quartz | Milky/Translucent Grade | 99.9% SiO₂ | 1100°C | Thermal shields, Diffusion boat holders, Insulation components |