Fertigungskapazitäten
CNC Precision Machining
Five-axis CNC grinding and milling centers delivering ±0.01 mm dimensional tolerance and Ra 0.1 μm surface finish on quartz, sapphire, and advanced ceramics.
CNC Precision Machining of Quartz & Ceramics
Precision machining of brittle non-metallic materials — fused quartz, sapphire, and technical ceramics — requires fundamentally different strategies from metal machining. Material brittleness, thermal sensitivity, and chemical reactivity to conventional coolants all demand specialized equipment, tooling, and process parameters.
At Tuguan Semiconductor, CNC precision machining is our core competency. Our grinding centers operate exclusively with diamond abrasive wheels and ultra-pure coolant systems designed to prevent contamination of precision quartz and ceramic workpieces.
Process Capabilities
Cylindrical Grinding (OD & ID)
External diameter (OD) and internal bore (ID) grinding is performed on our CNC cylindrical grinding machines equipped with diamond wheels.
| Specification | Standard | Premium |
|---|---|---|
| OD tolerance | ±0.02 mm | ±0.01 mm |
| ID tolerance | ±0.03 mm | ±0.02 mm |
| Roundness | ±0.01 mm | ±0.005 mm |
| Surface roughness | Ra 0.4 μm | Ra 0.1 μm |
| Max OD | 400 mm | 300 mm |
| Max length | 2000 mm | 1500 mm |
Surface Grinding & Lapping
Flat-surface grinding uses diamond cup wheels or segments; critical flatness is achieved by multi-pass lapping.
| Specification | Value |
|---|---|
| Flatness | < 0.005 mm (grinding) / < 0.002 mm (lapping) |
| Parallelism (opposite faces) | < 0.003 mm |
| Surface roughness | Ra 0.4 μm (grinding) / Ra 0.1 μm (lapping) |
| Max plate size | 500 × 500 mm |
Profile Grinding (Contour & Radius)
Five-axis CNC grinding allows complex profiles, chamfers, radii, and tapers to be generated in a single setup — minimizing repositioning error.
| Feature | Capability |
|---|---|
| Profile radius (convex/concave) | Down to R 1 mm |
| Angular features | ±0.1° |
| Complex contour accuracy | ±0.02 mm |
Why Diamond Tooling Only?
Quartz glass (hardness ~600 HV) and technical ceramics (hardness 1000–2700 HV) are 2–5× harder than hardened steel. Conventional abrasive wheels (corundum, silicon carbide) wear rapidly and risk contaminating the workpiece with abrasive particles. Diamond wheels provide:
- Long tool life — 10–20× longer than conventional abrasives on quartz
- Controlled chip formation — smaller chips reduce subsurface damage
- Consistent surface finish — predictable Ra throughout the wheel’s life
- Zero metallic contamination — no iron oxide from steel-bond wheels
Cleanroom-Compatible Machining
All CNC machining of semiconductor-grade components is performed with:
- Ultra-pure DI-water coolant — no cutting oils that would leave hydrocarbon residues
- Dedicated quartz-only machines — no cross-contamination from ceramic or metal jobs
- Enclosed machining cells — positive-pressure filtered air prevents airborne particle contamination
After machining, parts undergo ultrasonic cleaning, DI water rinsing, and IPA wipe-down in our ISO Class 7 cleanroom.
Supported Materials
| Material | Machinability | Key Tooling Requirement |
|---|---|---|
| Natural fused quartz | ★★★★☆ | Resin-bond diamond wheels |
| Synthetic fused silica | ★★★★☆ | Resin-bond diamond wheels |
| Sapphire | ★★★☆☆ | Metal-bond diamond, fine grit |
| Alumina (99.5%) | ★★★☆☆ | Resin/metal bond diamond |
| Silicon nitride | ★★★☆☆ | Metal-bond diamond |
| Silicon carbide | ★★☆☆☆ | Metal-bond diamond, coarse pre-grind |
| Boron nitride | ★★★★★ | Carbide or HSS tooling acceptable |
Typical Lead Times
| Order Type | Lead Time |
|---|---|
| Standard stock material, simple geometry | 5–7 working days |
| Custom from drawing, moderate complexity | 10–15 working days |
| Complex multi-step, tight tolerance | 15–25 working days |
| Rush order (subject to availability) | Contact us |