FUSED QUARTZ
Quartz Reactor Tube
High-purity fused quartz reactor tubes for epitaxy, CVD, and RTP systems — available with polished inner bore, side ports, and precision-ground flanges for process chamber integration.
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Quartz Reactor Tubes
Reactor tubes differ from standard diffusion tubes in their higher purity requirements, tighter dimensional tolerances, and more complex geometry — typically including side ports, flanged ends, polished inner surfaces, and integration with water-cooled metal assemblies.
Construction Features
Inner Surface Finish
CVD and epitaxy reactor tubes require smooth inner surfaces to prevent film nucleation on the tube walls, reduce particle generation from flaking deposits, and facilitate cleaning.
| Finish Level | Ra | Method | Application |
|---|---|---|---|
| Standard | ≤ 0.8 μm | Ground | General LPCVD, oxidation |
| Precision | ≤ 0.4 μm | Fine grinding | APCVD, epitaxy |
| Polished | ≤ 0.1 μm | CMP / flame polish | High-purity epitaxy, ALD |
Side Ports
Gas inlet and outlet ports, thermocouple feedthroughs, and pressure taps are welded into the tube wall at specified positions.
| Port Feature | Specification |
|---|---|
| Port OD range | 6–50 mm |
| Angular position | ±1° |
| Axial position | ±0.5 mm |
| Weld integrity | He leak rate < 1×10⁻⁹ mbar·L/s |
| Port tube length | 50–150 mm standard |
End Flanges
Reactor tubes typically terminate in precision-ground flanges that interface with water-cooled metal headers.
- Flange flatness: < 0.05 mm
- Concentricity to bore: < 0.1 mm TIR
- Available: Flat-face, stepped, or OEM-profile matched
Grade 2 Synthetic Silica as Standard
Reactor tubes for epitaxy and high-purity CVD are supplied in Grade 2 synthetic fused silica (< 50 ppb total metals) as the default material — matching the purity requirements of 12” wafer processes where iron, sodium, and boron contamination must be held below 1×10¹⁰ atoms/cm².
Grade 1 natural fused quartz is available for less-critical applications or where the lower cost is a priority.
Quality Verification Package
| Test | Details |
|---|---|
| ICP-OES purity | Full trace metal analysis certificate |
| Dimensional CMM | All critical dimensions vs. drawing |
| He leak test | All weld seams; certificate issued |
| Inner surface Ra | Profilometer measurement at 3 axial positions |
| Birefringence | Polariscope — < 10 nm/cm |
| Visual inspection | Bubble/cord/inclusion mapping under high-intensity illumination |
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