FUSED QUARTZ
Quartz Flanges & Fittings
Precision-machined fused quartz flanges, reducers, elbows, and tube fittings for semiconductor gas lines and furnace tube assemblies — compatible with standard metal flange interfaces.
Custom dimensions and specifications available upon request.
Quartz Flanges & Fittings
Quartz flanges connect quartz tubes, vessels, and injectors to each other and to metal components in furnace and gas-handling systems. The flange interface must be dimensionally compatible with the mating metal flange, and the quartz body must accommodate the thermal expansion differential between quartz (CTE 0.55×10⁻⁶/°C) and metal (CTE 10–17×10⁻⁶/°C).
Flange Types
Flat-Face Welded Flange
A solid quartz disc with a precision-ground flat face and bore, fusion-welded to the tube end.
| Specification | Value |
|---|---|
| Face flatness | < 0.05 mm |
| Bore tolerance | ±0.05 mm |
| Perpendicularity | < 0.1 mm TIR |
| OD range | 50–400 mm |
| Available face finishes | Ground, lapped, polished |
Stepped / Rabbet Flange
Flange with a machined shoulder (rabbet) that locates concentrically with the mating metal flange bore — provides self-centering for alignment-sensitive assemblies.
| Specification | Value |
|---|---|
| Rabbet diameter tolerance | ±0.05 mm |
| Step height tolerance | ±0.1 mm |
| Concentricity (rabbet to bore) | < 0.05 mm TIR |
Fittings & Adapters
| Part Type | Description |
|---|---|
| Reducing coupler | Joins two tubes of different OD in-line |
| 90° elbow | Quartz tube bent to 90° ± 1° |
| T-piece | Branch junction, all three ports welded |
| Tube-to-flange adapter | Converts tube OD to flange face interface |
| End cap | Closed flat or domed end |
| Ground joint (24/29, 34/35) | Standard laboratory glass taper joints |
All fittings are fusion-welded and annealed, with He leak test (< 1×10⁻⁹ mbar·L/s) on all weld joints.
Interface Compatibility
| Mating Flange System | Quartz Equivalent Available |
|---|---|
| ASA (ANSI) pipe flange | ✓ |
| ISO-KF (NW) quick-flange | ✓ (quartz body + metal ring) |
| Custom OEM bolt pattern | ✓ (drawing-based) |
| Swagelok tube fitting | ✓ (quartz stub + SS nut) |
Ready to order or need a custom size?
Submit your drawing or specifications — we respond within 24 hours.