Capabilities

Thermal Processing & Fusion Welding

High-temperature flame working, hydrogen-oxygen fusion welding, annealing, and stress-relief of fused quartz components �?He leak rate < 1×10⁻⁹ mbar·L/s.

Thermal Processing & Fusion Welding of Fused Quartz

Fused quartz’s softening point of 1683°C makes it unique among engineering materials: it can be reformed, welded, and shaped by flame without introducing internal stress �?provided the thermal processing is precisely controlled. Tuguan Semiconductor’s flame working and annealing capabilities allow complex quartz assemblies that are impossible to machine from solid stock.


Process Capabilities

Fusion (Flame) Welding

Oxy-hydrogen flame welding joins quartz tubes, flanges, and vessels into hermetic assemblies. Unlike adhesive bonding or mechanical connections, fusion welds are chemically identical to the parent material �?providing the same purity, chemical resistance, and temperature capability.

SpecificationValue
He leak rate (weld seam)< 1×10⁻⁹ mbar·L/s (standard) / < 1×10⁻¹⁰ mbar·L/s (optional)
Weld joint tensile strength�?95% of parent material
Weld joint purityNo metallic contamination �?same grade as base material
Wall thickness uniformity at weld±15% of nominal
Max tube OD300 mm
Min tube wall thickness1.5 mm
Joint typesButt weld, T-joint, flange attachment, tube-to-plate, bell end

Process notes:

  • All welds performed in clean, filtered-air environment �?no airborne contamination during open-flame working
  • Welds are annealed immediately after fusion to relieve thermal stress
  • 100% He leak testing on vacuum and gas-handling components

Flame Bending & Tube Forming

Straight quartz tubes can be bent, flared, necked, or formed into custom profiles using precisely controlled hydrogen-oxygen flames.

OperationAchievable Specification
Tube bending (radius �?2× OD)Angle ±1°; no collapse in bend region
Flaring (bell end)Wall uniformity ±10%; OD tolerance ±0.5 mm
Necking (OD reduction)OD tolerance ±0.3 mm
Tube-end closing (sealed ampoules)He leak rate < 1×10⁻⁹ mbar·L/s
Complex manifold fabricationDrawing-based; multiple bend + weld

Annealing & Stress Relief

After machining, flame working, or welding, fused quartz components may contain residual stress that manifests as birefringence. High-temperature annealing in our controlled-atmosphere furnace eliminates this stress, restoring optical homogeneity and reducing risk of in-service cracking.

SpecificationStandard AnnealOptical Grade Anneal
Annealing temperature1120°C (annealing point)1120°C (slow cool)
Cooling rate2�?°C/min to 500°C0.5�?°C/min to 500°C
Birefringence after< 10 nm/cm< 5 nm/cm
Residual stress (photoelastic)< 50 psi< 20 psi
Applicable materialsAll quartz gradesTransparent quartz only

Measurement: Birefringence is verified using a calibrated polariscope before shipment. Optical-grade components receive a birefringence test report.


Flame Polishing

Flame polishing uses a diffuse hydrogen-oxygen flame to reflow the outermost surface layer of quartz �?smoothing micro-cracks and improving surface finish without mechanical contact.

SpecificationValue
Surface roughness improvementFrom Ra 0.8�?.6 μm (ground) �?Ra 0.05�?.2 μm (flame polished)
Applicable geometryExternal surfaces of tubes, rods, plates
Surface purityNo abrasive particle contamination
LimitationNot suitable for tight-tolerance surfaces (dimensional change ±0.05�?.2 mm)

Purity & Contamination Control in Flame Working

Quartz flame working introduces heat �?and heat sources introduce potential contamination. Tuguan Semiconductor’s protocols prevent contamination:

Control MeasurePurpose
Ultra-high-purity H�?O�?fuel gasesPrevents carbon deposits from impure combustion
Boron-free refractory toolsPrevents B contamination in synthetic silica grade
Clean-room-grade work bench filtrationPrevents airborne metallic particles during open-flame work
Post-processing ultrasonic cleanRemoves surface deposits from flame operation
ICP-OES spot checkConfirms no contamination introduction for critical orders

Typical Products Requiring Thermal Processing

ProductProcess Applied
Diffusion tubes with flanged endsFusion weld (tube + flange), anneal
Bell jars and domesBlow forming + weld, anneal
U-tube heat exchangersMultiple bends + weld manifold
Cleaning tanks (HF-grade)Weld assembly of plates + fittings
Sealed optical cellsPrecision weld + He leak test
Reactor tubes with side portsTube drilling + port weld + anneal

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