Applications
Photovoltaic & Solar Cell Manufacturing
Fused quartz and silicon carbide components for PV cell diffusion, PECVD anti-reflection coating, and high-throughput thermal processing equipment.
Quartz & Ceramic Components for Solar Cell Manufacturing
Photovoltaic cell manufacturing shares many processes with semiconductor wafer fabrication — diffusion furnaces, PECVD reactors, and wet etching lines — but operates at much higher throughput (square meters per hour vs. wafers per hour). Component volume requirements and cost sensitivity differ accordingly.
Key PV Manufacturing Processes
P/N Junction Diffusion (POCl₃ or BBr₃)
PV cells require a shallow p-n junction created by phosphorus (POCl₃ diffusion) or boron (BBr₃ diffusion) at 800–950°C in quartz tube furnaces.
| Component | Material | PV-Specific Consideration |
|---|---|---|
| Diffusion tube | Natural fused quartz Grade 1 | Higher throughput — large boats, frequent cycling |
| Wafer boat | Fused quartz Grade 1 | 156/210 mm wafer format; high slot count |
| Source tube (POCl₃) | Fused quartz Grade 1 | Chemical compatibility with POCl₃ vapor |
| Paddle / fork | Fused quartz Grade 1 | Large-format wafer handling |
PECVD — SiNₓ Anti-Reflection Coating
Plasma-enhanced CVD deposits silicon nitride (SiNₓ) as an anti-reflection coating and surface passivation layer at 350–450°C.
| Component | Material | Key Requirement |
|---|---|---|
| Electrode plate | Fused quartz Grade 1 | Plasma-transparent; low contamination |
| Gas distribution plate | Fused quartz Grade 1 | Uniform hole array (±0.02 mm) |
| Chamber liner | Fused quartz Grade 1 | Prevents SiNₓ buildup bonding to metal walls |
Metallization Firing
Screen-printed metal contacts (Ag/Al paste) are fired at 700–900°C in belt furnaces with quartz process tubes or muffle tubes.
| Component | Material | Requirement |
|---|---|---|
| Muffle tube (belt furnace) | Fused quartz Grade 1 | Thermal cycling resistance; long service life |
| Radiant tube | Fused quartz Grade 1 | Uniform IR emission |
| Conveyor support | Alumina 99.5% or SiC | High-cycle thermal shock resistance |
Wafer Texturing
Alkaline or acid texturing creates pyramid microstructures on the silicon surface to reduce reflection. Quartz tanks provide chemical compatibility with NaOH, KOH, HF, and HNO₃ texturing solutions.
| Component | Material | Chemistry |
|---|---|---|
| Texturing tank | Fused quartz Grade 1 | KOH/NaOH (mono-Si) or HF/HNO₃ (multi-Si) |
| Rinse tank | Fused quartz Grade 1 | DI water |
| Overflow weir | Fused quartz Grade 1 | Cascade rinse |
High-Volume Supply Capability
PV manufacturing operates at high volume — a 1 GW per year cell line requires many hundreds of quartz boats, tubes, and tanks. Tuguan Semiconductor offers:
- Blanket order / consignment programs for steady-state consumption
- Fast replacement lead times (5–10 days for standard boats and tubes)
- Dimensional consistency across production lots — matched slot pitch for automated handling